Wafer detection
Small spot is provided by laser diode.
Detection of wafers in wafer carrier
To detect the presence or absence of wafers.
Collective detection of glass substrates
Detection of glass substrates in cassette.
Glass wafer detection
Ultrasonic sensor reliably detects wafers with water drops on them.
Silicon wafer detection
Compact ultrasonic sensor used for “underneath” detection.
Glass panel detection
Comb sensor detects the glass substarate stably.
Level detection for liquid
Detection of IC frame pitch holes
Small holes reliably detected with fiber cable in combination with lens unit.
Wafer notch detection
Coaxial reflective-type fiber cable with lens unit detecting small spot for notch detection.
Detection of glass substrate protrusion
Narrow-view fiber optic cable detecting substrate protrusion from cassette.
Robot arm-mounted sensor
Limited reflection type fiber optic cable integrated in arm.
Detection of work on IC tester
Passage of flat ICs checked.
Wafer detection in carrier
Wafer edges detected.
Detection of ICs in transparent sticks
Ultra-thin sensor fitting in space between sticks.
Detection of wafer in cleaning tank
PFA sensor installed inside tank
Collective detection of wafers
Presence of wafers in cassette collectively checked for mapping.
Lead frame detection
Thin head of only 2 mm in thickness detecting lead frames from underneath.
Detection of glass substrate for PDP
Glass substrates detected in vacuum chamber.
Detection of chips on lead frames
Variable-focus spot type reflective laser sensor checking presence of chips.
Detection of protrusion of wafers
Protrusion of wafer detected for prevention of trouble.
Detection of LCD board in vacuum tank
General-purpose fiber optic cable mounted in V-shape detecting through view-port and taking advantage of specular reflection.
Hard disk mapping
Smaller-pitch of LCD glass substrate sensor is ideal for this application.
Robot hand detection
Detection of Robot hand with glass substrate mounted on it in order to initiate stopping XY stage movement.
Wafer carrier detection
Wafer carrier detected through viewport of vacuum tank.
Wafer position detection
Narrow-view fiber optic cable allowing high-accuracy detection.
Detection of wafers in vacuum tank
Heat-resistant vacuum fiber optic cable mounted in V-shape to achieve limited reflection, therefore, making detection less subject to background interference.
Wafer detection
Heat-resistant vacuum through-beam type fiber optic cable detecting wafer in a vacuum tank.
