製品情報

ASW-SG Series
Wafer mapping sensor

  • To detect Silicon Carbide, Sapphire, Silicon and other translucent wafers.
  • Applicable to 6, 8 and 12 inch wafers
  • Translucent wafer mode (8 and 12 inch models)
  • Free from Electrostatic effects (comb sensor unit)
Standard・Official Approval
  • CE Mark

ASW-SG Series Lineups

Model Type Power supply Detection method Detecting distance Min (mm) Detecting distance (mm) Control output Light source Connection Use application Download
ASW-SG625AP
仕様を見る
Glass wafer detection 24VDC Through beam NPN Infrared LED Attached cable with connector semiconductor / LCD
ASW-SG85F
仕様を見る
Glass wafer detection 24VDC Through beam NPN Infrared LED Attached cable with connector semiconductor / LCD
ASW-SG85F-Y05
仕様を見る
Glass wafer detection 24VDC Through beam NPN Infrared LED Attached cable with connector semiconductor / LCD
ASW-SG86F
仕様を見る
Glass wafer detection 24VDC Through beam NPN Infrared LED Attached cable with connector semiconductor / LCD
ASW-SG86F-Y05
仕様を見る
Glass wafer detection 24VDC Through beam NPN Infrared LED Attached cable with connector semiconductor / LCD
ASW-SG125VF
仕様を見る
Glass wafer detection 12 - 24VDC Through beam NPN Infrared LED Connector type semiconductor / LCD

Feature

The wafer mapping sensor speeds up the sensing process while maintaining relaiable detection.

Dimension

ASW-SG625AP

The dimension shown in these drawingapply to the bottom end (※2), not the protrusion end (※1) of the comb.

ASW-SG85F
ASW-SG85F-Y05
ASW-SG86F
ASW-SG86F-Y05

The dimension shown in these drawingapply to the bottom end (※2), not the protrusion end(※1) of the comb.

ASW-SG125VF

The dimension shown in these drawingapply to the bottom end (※2), not the protrusion end (※1) of the comb.

Comb sensor unit
ASW-F2500

Comb sensor unit
ASW-F1600

Circuit

ASW-SG625AP
ASW-SG85F
ASW-SG86F
ASW-SG85F-Y05
ASW-SG86F-Y05

ASW-SG125VF

(For a noise prevention, a capacitor is installed between the 0V power supply and the sensor’s aluminum case.
Do not conduct withstand voltage Test between any input / output and the sensor case. )

External wiring and connector number

Semiconductor

Collective detection of glass substrates

Detection of glass substrates in cassette.

Semiconductor

Collective detection of wafers

Presence of wafers in cassette collectively checked for mapping.

Semiconductor

Mapping of hard disk

A small pitch type of liquid crystal PCB sensor.Glass PCB sensor.