ASW-SG85H/86H Series
Wafer mapping sensor
- To detect Silicon Cabide,Sapphire,Silicon and other translucent wafers.
- Compatible with wafers of up to 70% transmittance (in normal and latch modes)
- Can discriminate between 8-inch Si and SiC wafers
- Download
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ASW-SG85H/86H Series Lineups
| Model | Type | Power supply | Detection method | Detecting distance Min (mm) | Detecting distance (mm) | Control output | Light source | Connection | Use application | Download |
|---|---|---|---|---|---|---|---|---|---|---|
ASW-SG85H 
|
Wafer detection | 24VDC | Through beam | NPN | Infrared LED | Attached cable with connector | semiconductor | |||
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ASW-SG85H-Y05
|
Wafer detection | 24VDC | Through beam | NPN | Infrared LED | Attached cable with connector | semiconductor | |||
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ASW-SG86H
|
Wafer detection | 24VDC | Through beam | NPN | Infrared LED | Attached cable with connector | semiconductor | |||
|
ASW-SG86H-Y05
|
Wafer detection | 24VDC | Through beam | NPN | Infrared LED | Attached cable with connector | semiconductor |
Feature
Dimension
ASW-SG85H
ASW-SG85H-Y05
ASW-SG86H
ASW-SG86H-Y05
Circuit
Input/output circuit
* A capacitor is inserted for noise protection between the aluminum case and 0V power.
