製品情報

ASW-SG85H/86H Series
Wafer mapping sensor

  • To detect Silicon Cabide,Sapphire,Silicon and other translucent wafers.
  • Compatible with wafers of up to 70% transmittance (in normal and latch modes)
  • Can discriminate between 8-inch Si and SiC wafers

ASW-SG85H/86H Series Lineups

Model Type Power supply Detection method Detecting distance Min (mm) Detecting distance (mm) Control output Light source Connection Use application Download
ASW-SG85H
仕様を見る
Wafer detection 24VDC Through beam NPN Infrared LED Attached cable with connector semiconductor
ASW-SG85H-Y05
仕様を見る
Wafer detection 24VDC Through beam NPN Infrared LED Attached cable with connector semiconductor
ASW-SG86H
仕様を見る
Wafer detection 24VDC Through beam NPN Infrared LED Attached cable with connector semiconductor
ASW-SG86H-Y05
仕様を見る
Wafer detection 24VDC Through beam NPN Infrared LED Attached cable with connector semiconductor

Feature

Dimension

ASW-SG85H
ASW-SG85H-Y05
ASW-SG86H
ASW-SG86H-Y05

Circuit

Input/output circuit

* A capacitor is inserted for noise protection between the aluminum case and 0V power.

Semiconductor

Wafer detection

Collective detection of wafers