ASW-SG85H/86H Series
Wafer mapping sensor
- To detect Silicon Cabide,Sapphire,Silicon and other translucent wafers.
- Compatible with wafers of up to 70% transmittance (in normal and latch modes)
- Can discriminate between 8-inch Si and SiC wafers
ASW-SG85H/86H Series Lineups
Feature

Dimension
ASW-SG85H
ASW-SG85H-Y05
ASW-SG86H
ASW-SG86H-Y05

Circuit
Input/output circuit

* A capacitor is inserted for noise protection between the aluminum case and 0V power.
